Deposition of fine carbon particles using pulsed ArF laser ablation assisted by inductively coupled plasma
نویسندگان
چکیده
Carbon thin films containing many fine carbon particles were deposited by a pulsed ArF laser ablation technique assisted by inductively coupled plasma (ICP). The sizes of the particles were found to be ~ 100 nm. The particles seemed to be coagulated from several finer particles of size ~ 10 nm. When ICP was applied to a plume, the shape of the coagulated particles became spherical. The deposited surface was assumed to be diamond-like carbon based on the binding energy of carbon (1s) in the particle obtained by XPS spectra.
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